Author(s)

Xiaomin Zhu, Ping Cheng, Mingming Chen, Guifu Ding

Corresponding Author

Guifu Ding

Abstract

A MEMS-based planar inductor with double-layer spiral coil structure is developed in this study. The patterned permalloy which blank are filled with MnZn ferrite/PI composite materials is used as the magnetic layer of the inductor as well as the magnetic shielding layers. The double-layer planar inductor has a size of 1.5×1.5×0.15mm consisted of 13-turn spiral Cu coil for each layer and a 20-μm-thick patterned permalloy magnetic layers filled with MnZn ferrite/PI composite materials above and below. The inductor shows a higher inductance than the traditional planar inductor.The patterned permalloy made the inductor more stable in high frequency than the none-patterned. And the filling MnZn ferrite/PI composite materials made the inductor to achieve more excellent insulation and lower dissipation characteristics. And the inductor has an inductance of 1.3μH and quality factor of 2.8 at 1.5MHz.

Keywords

Permalloy;MnZn ferrite; Planar inductor; Double layers; Magnetic shielding; Patterned permalloy; MnZn/PI composite materials